Invention Grant
- Patent Title: Semiconductor device having buried oxide film
- Patent Title (中): 具有掩埋氧化膜的半导体器件
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Application No.: US12427140Application Date: 2009-04-21
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Publication No.: US08222696B2Publication Date: 2012-07-17
- Inventor: Shunpei Yamazaki , Hisashi Ohtani , Jun Koyama , Takeshi Fukunaga
- Applicant: Shunpei Yamazaki , Hisashi Ohtani , Jun Koyama , Takeshi Fukunaga
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP9-333453 19971118; JP9-337710 19971121; JP9-340754 19971126
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
An active region, a source region, and a drain region are formed on a single crystal semiconductor substrate or a single crystal semiconductor thin film. Impurity regions called pinning regions are formed in striped form in the active region so as to reach both of the source region and the drain region. Regions interposed between the pinning regions serve as channel forming regions. A tunnel oxide film, a floating gate, a control gate, etc. are formed on the above structure. The impurity regions prevent a depletion layer from expanding from the source region toward the drain region.
Public/Granted literature
- US20090315111A1 SEMICONDUCTOR DEVICE HAVING BURIED OXIDE FILM Public/Granted day:2009-12-24
Information query
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