The present invention relates to semiconductor field, especially relates to an oxynitride luminescent material, preparation method and its application. The oxynitride has a chemical formula of AxByOzN2/3x+4/3y−2/3z:R, wherein A is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Zn; B is one or more elements selected from the group consisting of Si, Ge, Zr, Ti, B, Al, Ga, In, Li, and Na, and at least contains Si. The oxynitride luminescent material according to the invention is excellent in chemical stability and luminescence property, and act as cyan to red luminescent material applicable to white light LED that excited by ultraviolet or blue light LED. Its excited wavelength is between 300-500 nm, while the emission wavelength at 470-700 nm. With blue or ultraviolet or near-ultraviolet LED, this type of material can be used to produce white light illumination or display light source.