Invention Grant
- Patent Title: Isolating a control signal source in a high frequency power supply
- Patent Title (中): 在高频电源中隔离控制信号源
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Application No.: US12177818Application Date: 2008-07-22
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Publication No.: US08222885B2Publication Date: 2012-07-17
- Inventor: Thomas Kirchmeier , Hans-Juergen Windisch , Michael Glueck , Erich Pivit
- Applicant: Thomas Kirchmeier , Hans-Juergen Windisch , Michael Glueck , Erich Pivit
- Applicant Address: DE Freiburg
- Assignee: Huettinger Elektronik GmbH + Co. KG
- Current Assignee: Huettinger Elektronik GmbH + Co. KG
- Current Assignee Address: DE Freiburg
- Agency: Fish & Richardson P.C.
- Priority: EPPCT/EP2008/002660 20080403
- Main IPC: H02M3/158
- IPC: H02M3/158

Abstract:
A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is connected to a reference potential varying in operation, and is activated by a driver, and wherein the driver has a differential input with two signal inputs and is connected to the reference potential varying in operation.
Public/Granted literature
- US20090027937A1 High frequency power supply Public/Granted day:2009-01-29
Information query
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