Invention Grant
- Patent Title: Sensor for simultaneous position and gap measurement
- Patent Title (中): 传感器同时进行位置和间隙测量
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Application No.: US12163802Application Date: 2008-06-27
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Publication No.: US08222892B2Publication Date: 2012-07-17
- Inventor: Martin Hosek , Christopher Hofmeister
- Applicant: Martin Hosek , Christopher Hofmeister
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Richard Pickreign
- Main IPC: G01B7/14
- IPC: G01B7/14

Abstract:
An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi-dimensional position includes at least a gap between the movable portion and the plurality of transformers.
Public/Granted literature
- US20090033316A1 SENSOR FOR POSITION AND GAP MEASUREMENT Public/Granted day:2009-02-05
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