Invention Grant
- Patent Title: Dark-field examination device
- Patent Title (中): 暗场检查装置
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Application No.: US12673525Application Date: 2009-01-16
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Publication No.: US08223326B2Publication Date: 2012-07-17
- Inventor: Tai-Wook Kim , Heui-Jae Park , Il-Hwan Lee
- Applicant: Tai-Wook Kim , Heui-Jae Park , Il-Hwan Lee
- Applicant Address: KR Seoul
- Assignee: Snu Precision Co., Ltd.
- Current Assignee: Snu Precision Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Dority & Manning, P.A.
- Priority: KR10-2008-0014859 20080219
- International Application: PCT/KR2009/000249 WO 20090116
- International Announcement: WO2009/104871 WO 20090827
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
The present invention relates to a dark-field examination device. The dark-field examination device according to the present invention is characterized in that it comprises: an illumination unit for irradiating light towards an examination object on a base; a reflection unit for reflecting, back towards the examination object, incident light which has been reflected by means of the examination object or incident light which has passed through the base; and an imaging unit for imaging the examination object by receiving light which has been scattered by means of the examination object, and in that the illumination unit, the reflection unit and the imaging unit are arranged in such a way that part of the light which has been irradiated from the illumination unit is scattered by means of the examination object and falls incident upon the imaging unit while another part of the light which has been irradiated from the illumination unit falls incident upon the reflection unit, and the light reflected back towards the examination object by means of the reflection unit is scattered by means of the examination object and falls incident upon the imaging unit.
Public/Granted literature
- US20110043794A1 Dark-Field Examination Device Public/Granted day:2011-02-24
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