Invention Grant
- Patent Title: Collection optics
- Patent Title (中): 收集光学
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Application No.: US12873387Application Date: 2010-09-01
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Publication No.: US08223443B2Publication Date: 2012-07-17
- Inventor: Azmi Kadkly
- Applicant: Azmi Kadkly
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Main IPC: G02B17/00
- IPC: G02B17/00 ; G02B5/10

Abstract:
An imaging system including a back-plane reflector having a concave aspherical reflecting surface and an outer diameter that is no greater than a first distance, with an aperture formed in the back-plane reflector, the aperture for admitting light from a field of view to the imaging system, a fore-plane reflector having a concave aspherical reflecting surface and an outer diameter that is no greater than the first distance, with an aperture formed in the fore-plane reflector, the aperture for discharging the light from the imaging system to an image plane, and a central reflector having a convex aspherical reflecting surface for receiving light from the fore-plane reflector and discharging the light from the imaging system through the aperture in the fore-plane reflector.
Public/Granted literature
- US20120050890A1 Collection Optics Public/Granted day:2012-03-01
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |