Invention Grant
- Patent Title: Method of quantitative analysis of hexavalent chromium in chromate coating and method for controlling hazardous element in encapsulating resin of resin encapsulation semiconductor device
- Patent Title (中): 铬酸盐涂层中六价铬的定量分析方法和树脂封装半导体器件封装树脂中有害元素的控制方法
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Application No.: US12575745Application Date: 2009-10-08
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Publication No.: US08223917B2Publication Date: 2012-07-17
- Inventor: Mitsuhiro Oki , Miyuki Takenaka
- Applicant: Mitsuhiro Oki , Miyuki Takenaka
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-253015 20050901
- Main IPC: G01N23/223
- IPC: G01N23/223

Abstract:
A method for controlling a hazardous element in an encapsulating resin of a resin encapsulation semiconductor device includes subjecting the device to qualitative analysis with a fluorescent X-ray analyzer to judge whether the hazardous element is contained in the encapsulating resin, aligning a plurality of devices with each of upper and lower surfaces of the devices brought into a plane, setting the surfaces of the devices to cover a full X-ray irradiation plane and subjecting the devices to quantitative analysis with the fluorescent X-ray analyzer to obtain an analytical value of the hazardous element in the encapsulating resin for upper and lower surfaces of the devices, and judging whether the analytical value of the hazardous element which is less influenced by a coexistent element of the analytical values for the upper and lower surfaces of the devices exceeds a threshold value.
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