Invention Grant
US08224066B2 Method and microscopy device for the deflectometric detection of local gradients and the three-dimensional shape of an object 失效
用于局部梯度的偏转检测和物体的三维形状的方法和显微镜装置

  • Patent Title: Method and microscopy device for the deflectometric detection of local gradients and the three-dimensional shape of an object
  • Patent Title (中): 用于局部梯度的偏转检测和物体的三维形状的方法和显微镜装置
  • Application No.: US12119890
    Application Date: 2008-05-13
  • Publication No.: US08224066B2
    Publication Date: 2012-07-17
  • Inventor: Gerd Haeusler
  • Applicant: Gerd Haeusler
  • Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
  • Main IPC: G06K9/00
  • IPC: G06K9/00
Method and microscopy device for the deflectometric detection of local gradients and the three-dimensional shape of an object
Abstract:
The invention relates to a method and an apparatus for high-resolution deflectometric determination of the local slope and of the three-dimensional shape of an object (6). The apparatus comprises a microscopic imaging system (5, 4, 8) having a numerical aperture (sin u), a focus plane (6a) and a receiving unit (9, 10); an illuminating system (1, 3, 4, 13, 13a) having a grating generator (1) that preferably generates a sine grating (2); and a control and evaluating unit. The object (6) is located in the object space of the imaging system. The illuminating system (13, 13a), which is fashioned as an illuminating system for reflected-light objects or for transmitted-light objects, generates a series of grating images (7), which are projected as virtual images into the object space a distance d from the focus plane of the microscopic imaging system. The imaging system images onto a receiving unit, as a modulated image, the object and simultaneously the grating image reflected in the object or the transmitted grating image. The local slope components of the object surface are determined from the series of modulated images with the aid of the evaluating unit.
Information query
Patent Agency Ranking
0/0