Invention Grant
US08225239B2 Methods for defining and utilizing sub-resolution features in linear topology
有权
在线性拓扑中定义和利用子分辨率特征的方法
- Patent Title: Methods for defining and utilizing sub-resolution features in linear topology
- Patent Title (中): 在线性拓扑中定义和利用子分辨率特征的方法
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Application No.: US12479674Application Date: 2009-06-05
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Publication No.: US08225239B2Publication Date: 2012-07-17
- Inventor: Brian Reed , Michael C. Smayling , Joseph N. Hong , Stephen Fairbanks , Scott T. Becker
- Applicant: Brian Reed , Michael C. Smayling , Joseph N. Hong , Stephen Fairbanks , Scott T. Becker
- Applicant Address: US CA Los Gatos
- Assignee: Tela Innovations, Inc.
- Current Assignee: Tela Innovations, Inc.
- Current Assignee Address: US CA Los Gatos
- Agency: Martine Penilla Group, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Regular layout shapes are placed in accordance with a virtual grate. A determination is made as to whether an unoccupied layout space adjacent to a regular layout shape to be reinforced, and extending in a direction perpendicular to the regular layout shape, is large enough to support placement of a sub-resolution shape. Upon determining that the unoccupied layout space is large enough to support placement of the sub-resolution shape, the sub-resolution shape is placed so as to be substantially centered upon a virtual line of the virtual grate within the unoccupied layout space. Also, one or more sub-resolution shapes are placed between and parallel with neighboring regular layout shapes when windows of lithographic reinforcement associated with each of the neighboring regular layout shapes permit. The sub-resolution shapes may be placed according to a virtual grate, or may be placed based on proximity to edges of the neighboring regular layout shapes.
Public/Granted literature
- US20090300574A1 Methods for Defining and Utilizing Sub-Resolution Features in Linear Topology Public/Granted day:2009-12-03
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