Invention Grant
- Patent Title: Method for making thermoacoustic device
- Patent Title (中): 制作热声装置的方法
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Application No.: US12756032Application Date: 2010-04-07
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Publication No.: US08225501B2Publication Date: 2012-07-24
- Inventor: Liang Liu , Zhuo Chen , Kai Liu , Chen Feng , Kai-Li Jiang , Shou-Shan Fan
- Applicant: Liang Liu , Zhuo Chen , Kai Liu , Chen Feng , Kai-Li Jiang , Shou-Shan Fan
- Applicant Address: CN Beijing TW Tu-Cheng, New Taipei
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW Tu-Cheng, New Taipei
- Agency: Altis Law Group, Inc.
- Priority: CN200910109570 20090807
- Main IPC: H05K3/02
- IPC: H05K3/02 ; H05K3/10
Abstract:
The present invention relates to a method for making a thermoacoustic device. The method includes the following steps. A substrate with a surface is provided. A plurality of microspaces is formed on the surface of the substrate. A sacrifice layer is fabricated to fill the microspaces. A metal film is deposited on the sacrifice layer, and the sacrifice layer is removed. A signal input device is provided to electrically connect with the metal film.
Public/Granted literature
- US20110031218A1 METHOD FOR MAKING THERMOACOUSTIC DEVICE Public/Granted day:2011-02-10
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