Invention Grant
US08225519B2 Contact type measurement device having fine contact force adjustment mechanism 有权
具有接触力调节机构的接触式测量装置

Contact type measurement device having fine contact force adjustment mechanism
Abstract:
A contact type measurement device performs measurement with displacement of a probe, while a contact member attached to the probe is in contact with an object to be measured. Data on the relationship of a contact force of the probe to the object to be measured with an angle between the central axis of the probe and the direction of gravity, the amount of displacement of the probe, and a fluid pressure for applying a pushing-out or pulling-in force to the probe is stored in advance and, on the basis of this data, the fluid pressure or the amount of displacement of the probe is controlled to automatically and precisely adjust a fine contact force of the probe to the object to be measured.
Information query
Patent Agency Ranking
0/0