Invention Grant
- Patent Title: Thermal flow meter measuring flow rate based on temperature difference measurement and driving energy of the heater
- Patent Title (中): 热流量计基于温差测量和加热器的驱动能量测量流量
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Application No.: US12599950Application Date: 2008-04-22
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Publication No.: US08225652B2Publication Date: 2012-07-24
- Inventor: Manabu Muraoka , Masaki Seo , Junichi Matsuda , Masanori Anzai
- Applicant: Manabu Muraoka , Masaki Seo , Junichi Matsuda , Masanori Anzai
- Applicant Address: JP Tokyo
- Assignee: Azbil Corporation
- Current Assignee: Azbil Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-137906 20070524
- International Application: PCT/JP2008/057767 WO 20080422
- International Announcement: WO2008/142941 WO 20081127
- Main IPC: G01F1/68
- IPC: G01F1/68

Abstract:
A thermal flow meter has a sensor chip, a heater, first and second flow rate calculators, and an output controller. The heater increases the ambient temperature in the vicinity of a pair of temperature-sensing elements on the sensor chip by a particular temperature above a temperature of a fluid flowing along the sensor chip. The first flow rate calculator calculates a flow rate of the fluid from a temperature difference detected by the pair of temperature-sensing elements. The second flow rate calculator calculates a flow rate of the fluid from a driving energy of the heater. The output controller outputs the flow rate calculated by the second flow rate calculator, instead of the flow rate calculated by the first flow rate calculator, when the flow rate calculated by the first flow rate calculator exceeds a flow rate threshold value that is set in advance.
Public/Granted literature
- US20100223991A1 THERMAL FLOW METER Public/Granted day:2010-09-09
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