Invention Grant
- Patent Title: Methods of removing particles from over semiconductor substrates
- Patent Title (中): 从半导体衬底上去除颗粒的方法
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Application No.: US12350789Application Date: 2009-01-08
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Publication No.: US08226772B2Publication Date: 2012-07-24
- Inventor: Neil Joseph Greeley , Dan Millward , Wayne Huang
- Applicant: Neil Joseph Greeley , Dan Millward , Wayne Huang
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B08B3/04
- IPC: B08B3/04

Abstract:
Some embodiments include methods of removing particles from over surfaces of semiconductor substrates. Liquid may be flowed across the surfaces and the particles. While the liquid is flowing, electrophoresis and/or electroosmosis may be utilized to enhance transport of the particles from the surfaces and into the liquid. In some embodiments, temperature, pH and/or ionic strength within the liquid may be altered to assist in the removal of the particles from over the surfaces of the substrates.
Public/Granted literature
- US20100170531A1 Methods of Removing Particles From Over Semiconductor Substrates Public/Granted day:2010-07-08
Information query
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