Invention Grant
- Patent Title: Polishing composition for nickel-phosphorous memory disks
- Patent Title (中): 镍磷记忆盘抛光组合物
-
Application No.: US12364937Application Date: 2009-02-03
-
Publication No.: US08226841B2Publication Date: 2012-07-24
- Inventor: Selvaraj Palanisamy Chinnathambi , Haresh Siriwardane
- Applicant: Selvaraj Palanisamy Chinnathambi , Haresh Siriwardane
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas E. Omholt; Francis J. Koszyk; Steven D. Weseman
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
The invention provides a chemical-mechanical polishing composition comprising alpha alumina, fumed alumina, silica, an oxidizing agent that oxidizes nickel-phosphorous, oxalic acid, optionally, tartaric acid, optionally, a nonionic surfactant, optionally, a biocide, and water. The invention also provides a method of chemically-mechanically polishing a substrate comprising contacting a substrate with a polishing pad and the chemical-mechanical polishing composition, moving the polishing pad and the polishing composition relative to the substrate, and abrading at least a portion of the substrate to polish the substrate.
Public/Granted literature
- US20100193470A1 POLISHING COMPOSITION FOR NICKEL-PHOSPHOROUS MEMORY DISKS Public/Granted day:2010-08-05
Information query