Invention Grant
US08227170B2 Resist composition, method of forming resist pattern, polymeric compound, and compound
有权
抗蚀剂组合物,形成抗蚀剂图案的方法,聚合物和化合物
- Patent Title: Resist composition, method of forming resist pattern, polymeric compound, and compound
- Patent Title (中): 抗蚀剂组合物,形成抗蚀剂图案的方法,聚合物和化合物
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Application No.: US12685579Application Date: 2010-01-11
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Publication No.: US08227170B2Publication Date: 2012-07-24
- Inventor: Takahiro Dazai , Daiju Shiono , Tomoyuki Hirano , Tasuku Matsumiya , Daichi Takaki , Takayoshi Mori , Junichi Tsuchiya
- Applicant: Takahiro Dazai , Daiju Shiono , Tomoyuki Hirano , Tasuku Matsumiya , Daichi Takaki , Takayoshi Mori , Junichi Tsuchiya
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2009-006006 20090114
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; C08F28/06 ; C07D327/04

Abstract:
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of an acid, and an acid generator component (B), wherein the base component (A) includes a polymeric compound (A0) containing a structural unit (a0) represented by the general formula (a0-1) shown below: (wherein, R1 represents a hydrogen atom, an alkyl group or a halogenated alkyl group; R2 represents a bivalent linking group containing at least one kind of polar groups selected from the group consisting of —O—, —C(═O)—, —C(═O)—O—, a carbonate linkage (—O—C(═O)—O—), —S—, —S(═O)2—, —S(═O)2—O—, —NH—, —NR04— (wherein, R04 represents an alkyl group or an acyl group), and —NH—C(═O)—; and R3 represents a cyclic group containing a sulfonyl group within the ring skeleton).
Public/Granted literature
- US20100178609A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND, AND COMPOUND Public/Granted day:2010-07-15
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