Invention Grant
- Patent Title: Semiconductor device manufacturing method and semiconductor device
- Patent Title (中): 半导体器件制造方法和半导体器件
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Application No.: US12629150Application Date: 2009-12-02
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Publication No.: US08227317B2Publication Date: 2012-07-24
- Inventor: Hideaki Kuroda
- Applicant: Hideaki Kuroda
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: JP2008-309660 20081204
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor device manufacturing method includes the steps of: forming a transistor on a surface side of a silicon layer of a silicon-on-insulator substrate, the silicon-on-insulator substrate being formed by laminating a substrate, an insulating layer, and the silicon layer; forming a first insulating film covering the transistor and a wiring section including a part electrically connected to the transistor on the silicon-on-insulator substrate; measuring a threshold voltage of the transistor through the wiring section; forming a supporting substrate on a surface of the first insulating film with a second insulating film interposed between the supporting substrate and the first insulating film; removing at least a part of the substrate and the insulating layer on a back side of the silicon-on-insulator substrate; and adjusting the threshold voltage of the transistor on a basis of the measured threshold voltage.
Public/Granted literature
- US20100140617A1 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE Public/Granted day:2010-06-10
Information query
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