Invention Grant
- Patent Title: Ni plating of a BLM edge for Pb-free C4 undercut control
- Patent Title (中): 用于无铅C4底切控制的BLM边缘的镀镍
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Application No.: US12948092Application Date: 2010-11-17
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Publication No.: US08227333B2Publication Date: 2012-07-24
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- Applicant: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent David A. Cain, Esq.
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A structure and a method of manufacturing a Pb-free Controlled Collapse Chip Connection (C4) with a Ball Limiting Metallurgy (BLM) structure for semiconductor chip packaging that reduce chip-level cracking during the Back End of Line (BEOL) processes of chip-join cool-down. An edge of the BLM structure that is subject to tensile stress during chip-join cool down is protected from undercut of a metal seed layer, caused by wet etch of the chip to remove metal layers from the chip's surface and solder reflow, by an electroplated barrier layer, which covers a corresponding edge of the metal seed layer.
Public/Granted literature
- US20120119362A1 NI PLATING OF A BLM EDGE FOR PB-FREE C4 UNDERCUT CONTROL Public/Granted day:2012-05-17
Information query
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