Invention Grant
- Patent Title: Interconnecting structure production method, and interconnecting structure
- Patent Title (中): 互连结构生产方法和互连结构
-
Application No.: US12761742Application Date: 2010-04-16
-
Publication No.: US08227347B2Publication Date: 2012-07-24
- Inventor: Noriyuki Tatsumi
- Applicant: Noriyuki Tatsumi
- Applicant Address: JP Tokyo
- Assignee: Hitachi Cable, Ltd.
- Current Assignee: Hitachi Cable, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Priority: JP2009-100703 20090417
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
An interconnecting structure production method includes providing a substrate, forming a semiconductor layer on the substrate, forming a doped semiconductor layer on the semiconductor layer, the doped semiconductor layer containing a dopant, forming an oxide layer in a surface of the doped semiconductor layer by heating the surface of the doped semiconductor layer in atmosphere of an oxidizing gas with a water molecule contained therein, forming an alloy layer on the oxide layer, and forming an interconnecting layer on the alloy layer.
Public/Granted literature
- US20100264415A1 INTERCONNECTING STRUCTURE PRODUCTION METHOD, AND INTERCONNECTING STRUCTURE Public/Granted day:2010-10-21
Information query
IPC分类: