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US08228069B2 Test apparatus for determining if adjacent contacts are short-circuited and semiconductor integrated circuit devices that include such test apparatus 有权
用于确定相邻触点是否短路的测试装置和包括这种测试装置的半导体集成电路器件

Test apparatus for determining if adjacent contacts are short-circuited and semiconductor integrated circuit devices that include such test apparatus
Abstract:
A test apparatus includes a plurality of pairs of test contacts on a semiconductor substrate; a first test structure which includes a plurality of first test interconnection layers and a first body interconnection layer that is electrically connected to the first test interconnection layers, each of the first test interconnection layers being electrically connected to at least one test contact; and a second test structure which includes a plurality of second test interconnection layers and a second body interconnection layer that is electrically connected to the second test interconnection layers, each of the second test interconnection layers being electrically connected to at least one test contact.
Abstract(Chinese):

测试装置包括在半导体衬底上的多对测试触点; 第一测试结构，其包括多个第一测试互连层和电连接到第一测试互连层的第一体互连层，每个第一测试互连层电连接到至少一个测试接触; 以及第二测试结构，其包括多个第二测试互连层和电连接到第二测试互连层的第二体互连层，每个第二测试互连层电连接到至少一个测试接触。

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