Invention Grant
- Patent Title: Q enhancement in micromachined lateral-extensional resonators
- Patent Title (中): 微加工横向拉伸谐振器的Q增强
-
Application No.: US12626491Application Date: 2009-11-25
-
Publication No.: US08228141B2Publication Date: 2012-07-24
- Inventor: Reza Abdolvand , Brandon Harrington
- Applicant: Reza Abdolvand , Brandon Harrington
- Applicant Address: US OK Stillwater
- Assignee: The Board of Regents for Oklahoma State University
- Current Assignee: The Board of Regents for Oklahoma State University
- Current Assignee Address: US OK Stillwater
- Agency: Fellers, Snider, Blankenship, Bailey & Tippens, P.C.
- Main IPC: H03H9/09
- IPC: H03H9/09 ; H03H9/15 ; H03H9/24 ; H03H9/50
Abstract:
A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to reflect a substantial portion of planar acoustic energy received from the tether back into the tether.
Public/Granted literature
- US20100156566A1 Q ENHANCEMENT IN MICROMACHINED LATERAL-EXTENSIONAL RESONATORS Public/Granted day:2010-06-24
Information query
