Invention Grant
US08228269B2 Inspection device and inspection method for active matrix panel, and manufacturing method for active matrix organic light emitting diode panel 失效
有源矩阵面板的检查装置和检查方法,以及有源矩阵有机发光二极管面板的制造方法

Inspection device and inspection method for active matrix panel, and manufacturing method for active matrix organic light emitting diode panel
Abstract:
An inspection method includes an array process of forming a TFT array on a substrate to fabricate an active matrix panel, an inspection process of carrying out a performance test on the fabricated active matrix panel, and a cell process of mounting an OLED on the active matrix panel after the inspection process. In the inspection process, variation in parasitic capacitance through a pixel electrode is measured when driving TFTs constituting the active matrix fabricated in the array process are turned on and when the driving TFTs are turned off, and open/short defects in the driving TFTs are thereby inspected.
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