Invention Grant
US08228269B2 Inspection device and inspection method for active matrix panel, and manufacturing method for active matrix organic light emitting diode panel
失效
有源矩阵面板的检查装置和检查方法,以及有源矩阵有机发光二极管面板的制造方法
- Patent Title: Inspection device and inspection method for active matrix panel, and manufacturing method for active matrix organic light emitting diode panel
- Patent Title (中): 有源矩阵面板的检查装置和检查方法,以及有源矩阵有机发光二极管面板的制造方法
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Application No.: US11927291Application Date: 2007-10-29
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Publication No.: US08228269B2Publication Date: 2012-07-24
- Inventor: Daiju Nakano , Yoshitami Sakaguchi
- Applicant: Daiju Nakano , Yoshitami Sakaguchi
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Priority: JP2003-142972 20030521
- Main IPC: G09G3/30
- IPC: G09G3/30

Abstract:
An inspection method includes an array process of forming a TFT array on a substrate to fabricate an active matrix panel, an inspection process of carrying out a performance test on the fabricated active matrix panel, and a cell process of mounting an OLED on the active matrix panel after the inspection process. In the inspection process, variation in parasitic capacitance through a pixel electrode is measured when driving TFTs constituting the active matrix fabricated in the array process are turned on and when the driving TFTs are turned off, and open/short defects in the driving TFTs are thereby inspected.
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