Methods and apparatus for vertically orienting substrate processing tools in a clean space

Invention Grant

US08229585B2 Methods and apparatus for vertically orienting substrate processing tools in a clean space 有权

Title translation: 将基板处理工具垂直定向在清洁空间中的方法和装置

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Patent Title: Methods and apparatus for vertically orienting substrate processing tools in a clean space
Patent Title (中): 将基板处理工具垂直定向在清洁空间中的方法和装置
Application No.: US11520975

Application Date: 2006-09-14
Publication No.: US08229585B2

Publication Date: 2012-07-24
Inventor: Frederick A. Flitsch
Applicant: Frederick A. Flitsch
Main IPC: G06F19/00
IPC: G06F19/00

Methods and apparatus for vertically orienting substrate processing tools in a clean space

Abstract:

A computerized system for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.

Abstract(Chinese):

一种用于制造设备的计算机化系统，其能够相对于彼此至少垂直维度地例行放置和替换处理工具。

Public/Granted literature

US20070269296A1 Methods and apparatus for vertically orienting substrate processing tools in a clean space Public/Granted day:2007-11-22

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