Invention Grant
- Patent Title: Corrosion barrier layer for photoconductive X-ray imagers
- Patent Title (中): 光导X射线成像仪的腐蚀阻挡层
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Application No.: US11731170Application Date: 2007-03-29
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Publication No.: US08232531B2Publication Date: 2012-07-31
- Inventor: George Zentai , Larry Partain , William Wei-Yu Yao , Richard Weisfield
- Applicant: George Zentai , Larry Partain , William Wei-Yu Yao , Richard Weisfield
- Applicant Address: US CA Palo Alto US CA Palo Alto
- Assignee: Varian Medical Systems, Inc.,dpiX, LLC
- Current Assignee: Varian Medical Systems, Inc.,dpiX, LLC
- Current Assignee Address: US CA Palo Alto US CA Palo Alto
- Agency: Lumen Patent Firm
- Main IPC: H01L25/00
- IPC: H01L25/00

Abstract:
Improved corrosion resistance for direct X-ray imaging detectors is obtained by providing a pixelated, electrically conductive barrier layer between the X-ray sensitive material and the pixel electrodes. Each barrier layer can cover part or all of its corresponding pixel electrode. In cases where pixel electrodes makes contact to underlying circuitry through vertical vias, it is preferred for the barrier layers to cover the via sections of the pixel electrodes. The barrier layers for each pixel electrode can be spaced apart from each other, or they can all be included within a continuous film on top of the pixel electrodes. Such a continuous film can be pixelated by spatially modulating its properties (e.g., thickness, doping) to significantly reduce lateral conductivity from pixel to pixel.
Public/Granted literature
- US20080237481A1 Corrosion barrier layer for photoconductive X-ray imagers Public/Granted day:2008-10-02
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