Invention Grant
US08232532B2 Off-axis ion milling device for manufacture of magnetic recording media and method for using the same 有权
用于制造磁记录介质的离轴离子研磨装置及其使用方法

Off-axis ion milling device for manufacture of magnetic recording media and method for using the same
Abstract:
A tool for patterning a disk such as a magnetic media disk for use in a disk drive system. The tool includes a chamber and a first and second series of magnets, each evenly spaced about the chamber wall. An ion beam source at an end of the chamber emits an ion beam toward the disk which is held within the chamber. The first series of magnets deflect the ion beam away from center and toward the chamber wall. The second ion beam source deflects the ion beam back toward the center so that the ion beam can strike the disk at an angle. In addition, to bending the ion beam, the magnets also rotate the bent ion beam so the movement of the ion beam revolves within the chamber.
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