Invention Grant
- Patent Title: Determining critical current density for interconnect
- Patent Title (中): 确定互连的临界电流密度
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Application No.: US12620955Application Date: 2009-11-18
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Publication No.: US08232809B2Publication Date: 2012-07-31
- Inventor: Chad M. Burke , Cathryn J. Christiansen , Baozhen Li
- Applicant: Chad M. Burke , Cathryn J. Christiansen , Baozhen Li
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Richard Kotulak
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26

Abstract:
Solutions for determining a critical current density of a line are disclosed. In one embodiment a method of determining a critical current density in a line includes: applying a temperature condition to each of a plurality of samples including the line; calculating a cross-sectional area of the line for each of the plurality samples using data about an electrical resistance of the line over each of the temperature conditions; measuring an electrical current reading through the line for each of the plurality of samples; determining a current density through the line for each of the plurality of samples by dividing each electrical current reading by each corresponding cross-sectional area; determining an electromigration (EM) failure time for each of the plurality of samples; and determining the critical current density of the line using the current density and the plurality of EM failure times.
Public/Granted literature
- US20110115508A1 DETERMINING CRITICAL CURRENT DENSITY FOR INTERCONNECT Public/Granted day:2011-05-19
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