Invention Grant
US08233141B2 Shutter pixel, shutter structure including the shutter pixel, and exposure apparatus including the shutter structure 有权
快门像素,包括快门像素的快门结构和包括快门结构的曝光设备

Shutter pixel, shutter structure including the shutter pixel, and exposure apparatus including the shutter structure
Abstract:
The present invention provides a shutter pixel, a shutter structure including the shutter pixel, and an exposure apparatus including the shutter structure. The shutter pixel may include a lower substrate, an electrode disposed on the lower substrate, a spacer disposed on the edge of the electrode, a first mirror disposed on the spacer to be separated from the electrode and including a hole, an upper substrate disposed on the lower substrate to face the lower substrate, and a second mirror disposed at the upper substrate and overlapping the hole. Accordingly, a relatively simple structure may be provided.
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