Invention Grant
- Patent Title: Shutter pixel, shutter structure including the shutter pixel, and exposure apparatus including the shutter structure
- Patent Title (中): 快门像素,包括快门像素的快门结构和包括快门结构的曝光设备
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Application No.: US12620398Application Date: 2009-11-17
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Publication No.: US08233141B2Publication Date: 2012-07-31
- Inventor: Guk Hyun Kim , Won-Ki Hong
- Applicant: Guk Hyun Kim , Won-Ki Hong
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2009-0017725 20090302
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54

Abstract:
The present invention provides a shutter pixel, a shutter structure including the shutter pixel, and an exposure apparatus including the shutter structure. The shutter pixel may include a lower substrate, an electrode disposed on the lower substrate, a spacer disposed on the edge of the electrode, a first mirror disposed on the spacer to be separated from the electrode and including a hole, an upper substrate disposed on the lower substrate to face the lower substrate, and a second mirror disposed at the upper substrate and overlapping the hole. Accordingly, a relatively simple structure may be provided.
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