Invention Grant
- Patent Title: Reagent dispensing apparatuses and delivery methods
- Patent Title (中): 试剂分配装置和配送方法
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Application No.: US12612073Application Date: 2009-11-04
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Publication No.: US08235364B2Publication Date: 2012-08-07
- Inventor: Demetrius Sarigiannis , M. Mushtaq Ahmed
- Applicant: Demetrius Sarigiannis , M. Mushtaq Ahmed
- Applicant Address: US CT Danbury
- Assignee: Praxair Technology, Inc.
- Current Assignee: Praxair Technology, Inc.
- Current Assignee Address: US CT Danbury
- Agent Nilay S. Dalal; Iurie A. Schwartz
- Main IPC: B01F3/04
- IPC: B01F3/04

Abstract:
This invention relates to a vapor or liquid phase reagent dispensing apparatus that may be used for dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. The vapor phase reagent dispensing apparatus has a single port capable of receiving a carrier gas and dispensing a vapor phase reagent. The liquid phase reagent dispensing apparatus has a single port capable of receiving an inert gas and dispensing a liquid phase reagent.
Public/Granted literature
- US20100117246A1 REAGENT DISPENSING APPARATUSES AND DELIVERY METHODS Public/Granted day:2010-05-13
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