Composition and method for low temperature deposition of silicon-containing films

Invention Grant

US08236097B2 Composition and method for low temperature deposition of silicon-containing films 有权

Title translation: 含硅薄膜低温沉积的组成和方法

Patent Title: Composition and method for low temperature deposition of silicon-containing films
Patent Title (中): 含硅薄膜低温沉积的组成和方法
Application No.: US13028193

Application Date: 2011-02-15
Publication No.: US08236097B2

Publication Date: 2012-08-07
Inventor: Ziyun Wang , Chongying Xu , Thomas H. Baum , Bryan C. Hendrix , Jeffrey F. Roeder
Applicant: Ziyun Wang , Chongying Xu , Thomas H. Baum , Bryan C. Hendrix , Jeffrey F. Roeder
Applicant Address: US CT Danbury
Assignee: Advanced Technology Materials, Inc.
Current Assignee: Advanced Technology Materials, Inc.
Current Assignee Address: US CT Danbury
Agency: Hultquist, PLLC
Agent Steven J. Hultquist; Maggie Chappuis
Main IPC: C09D5/00
IPC: C09D5/00 ; C07F7/02 ; C23C16/40

Abstract:

This invention relates to silicon precursor compositions for forming silicon-containing films by low temperature (e.g.,

Abstract(Chinese):

本发明涉及通过用于制造ULSI器件和器件结构的低温（例如，<300℃）的化学气相沉积工艺形成含硅膜的硅前体组合物。这种硅前体组合物包含至少一个完全被烷基氨基和/或二烷基氨基官能团取代的二烷基硅烷衍生物化合物。

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IPC分类:

C	化学；冶金
C09	染料；涂料；抛光剂；天然树脂；黏合剂；其他类目不包含的组合物；其他类目不包含的材料的应用
C09D	涂料组合物，例如色漆、清漆或天然漆；填充浆料；化学涂料或油墨的去除剂；油墨；改正液；木材着色剂；用于着色或印刷的浆料或固体；原料为此的应用（化妆品入A61K，一般将液体或其他流动物料涂到表面上的方法入B05D；木材着色入B27K5/02；釉料或搪瓷釉入C03C；天然树脂、虫胶清漆、干性油、催干剂、松节油本身入C09F；除虫胶清漆外的抛光组合物、滑雪屐蜡入C09G；黏合剂或用作黏合剂的物质入C09J；用于接头或盖的密封或包装材料入C09K3/10；用于防止泄漏的材料入C09K3/12；电解或电泳生成镀层的方
C09D5/00	以其物理性质或所产生的效果为特征的涂料组合物，例如色漆、清漆或天然漆；填充浆料