Invention Grant
- Patent Title: Plating methods for low aspect ratio cavities
- Patent Title (中): 用于低纵横比腔的电镀方法
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Application No.: US12785976Application Date: 2010-05-24
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Publication No.: US08236160B2Publication Date: 2012-08-07
- Inventor: Bulent M. Basol
- Applicant: Bulent M. Basol
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: C25D5/52
- IPC: C25D5/52

Abstract:
The present invention relates to methods and apparatus for plating a conductive material on a workpiece surface in a highly desirable manner. Using a workpiece-surface-influencing device, such as a mask or sweeper, that preferentially contacts the top surface of the workpiece, relative movement between the workpiece and the workpiece-surface-influencing device is established so that an additive in the electrolyte solution disposed on the workpiece and which is adsorbed onto the top surface is removed or otherwise its amount or concentration changed with respect to the additive on the cavity surface of the workpiece. Plating of the conductive material can place prior to, during and after usage of the workpiece-surface-influencing device, particularly after the workpiece surface influencing device no longer contacts any portion of the top surface of the workpiece, to achieve desirable semiconductor structures.
Public/Granted literature
- US20100224501A1 PLATING METHODS FOR LOW ASPECT RATIO CAVITIES Public/Granted day:2010-09-09
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