Invention Grant
- Patent Title: Apparatus for electrolyzing sulfuric acid, method of performing electrolysis, and apparatus for processing a substrate
- Patent Title (中): 硫酸电解装置,电解方法以及基板处理装置
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Application No.: US12274681Application Date: 2008-11-20
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Publication No.: US08236161B2Publication Date: 2012-08-07
- Inventor: Nobuo Kobayashi , Yukihiro Shibata , Naoya Hayamizu , Masaaki Kato
- Applicant: Nobuo Kobayashi , Yukihiro Shibata , Naoya Hayamizu , Masaaki Kato
- Applicant Address: JP Kanagawa JP Tokyo JP Tokyo
- Assignee: Shibaura Mechatronics Corporation,Kabushiki Kaisha Toshiba,Chlorine Engineers Corp., Ltd.
- Current Assignee: Shibaura Mechatronics Corporation,Kabushiki Kaisha Toshiba,Chlorine Engineers Corp., Ltd.
- Current Assignee Address: JP Kanagawa JP Tokyo JP Tokyo
- Agency: Volpe and Koenig, P.C.
- Priority: JP2007-006017 20070115
- Main IPC: C25B1/28
- IPC: C25B1/28 ; C23G1/00

Abstract:
An apparatus for electrolyzing sulfuric acid, the apparatus comprising an electrolytic cell comprising a cathode chamber having a cathode and an anode chamber having an anode, the cathode chamber and the anode chamber being separated by a diaphragm, a sulfuric acid tank configured to store the sulfuric acid, a supply pipe connecting the sulfuric acid tank to an inlet port of the anode chamber, a connection pipe connecting an outlet port of the cathode chamber to the inlet port of the anode chamber, a first supply pump provided on the supply pipe and configured to supply the sulfuric acid from the sulfuric acid tank to the cathode chamber through the supply pipe, and a drain pipe connected to an outlet port of the anode chamber and configured to supply to a solution tank a solution containing an oxidizing agent generated by electrolysis in the anode chamber.
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