Invention Grant
- Patent Title: Ink-jet printhead manufacturing process
- Patent Title (中): 喷墨打印头制造工艺
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Application No.: US12520795Application Date: 2006-12-22
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Publication No.: US08236187B2Publication Date: 2012-08-07
- Inventor: Lucia Giovanola
- Applicant: Lucia Giovanola
- Applicant Address: IT Milan
- Assignee: Telecom Italia S.p.A.
- Current Assignee: Telecom Italia S.p.A.
- Current Assignee Address: IT Milan
- Agency: Venable LLP
- Agent Robert Kinberg
- International Application: PCT/EP2006/012453 WO 20061222
- International Announcement: WO2008/077419 WO 20080703
- Main IPC: G01D15/00
- IPC: G01D15/00 ; G11B5/127 ; B41J2/14

Abstract:
A process for manufacturing an inkjet print head comprising the steps of providing a print head wafer comprising a plurality of print head dice coated with a barrier layer, each print head die comprising a plurality of actuators and interconnections, the barrier layer comprising a plurality of openings in correspondence with the plurality of actuators and interconnections, providing a debondable SOI wafer comprising a handle layer, a buried layer, and a device layer, forming a protective layer on the surface of the device layer, bonding the device layer to the barrier layer, debonding the handle layer from the SOI wafer, etching the device layer so as to realize a plurality of openings in correspondence with the plurality of actuators and interconnections, and removing the protective layer in correspondence of the plurality of openings.
Public/Granted literature
- US20100032408A1 INK-JET PRINTHEAD MANUFACTURING PROCESS Public/Granted day:2010-02-11
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