Invention Grant
- Patent Title: Method to fabricate a redirecting mirror in optical waveguide devices
- Patent Title (中): 在光波导器件中制造重定向镜的方法
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Application No.: US12966619Application Date: 2010-12-13
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Publication No.: US08236481B2Publication Date: 2012-08-07
- Inventor: Alessandro Nottola , Umberto Colombo , Giorgio Cataldo Mutinati , Stefano Sardo
- Applicant: Alessandro Nottola , Umberto Colombo , Giorgio Cataldo Mutinati , Stefano Sardo
- Applicant Address: US CA Mountain View
- Assignee: Google Inc.
- Current Assignee: Google Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Honigman Miller Schwartz and Cohn LLP
- Main IPC: G02B6/42
- IPC: G02B6/42 ; G03F7/20

Abstract:
A method of fabricating a turning mirror for an optical device includes the steps of depositing on a substrate, which defines a plane in which an optical signal propagates in a propagating direction, a photoresist layer sensitive to electrons and to UV radiation. The material in which the photoresist layer is formed, has a contrast not larger than 3. A first portion of the photoresist layer is exposed to an electron beam, wherein the electron dose of the electron beam exposure is varied within the first portion according to a selected pattern, and wherein the electron does to which a given region in the photoresist is exposed, depends on the resulting photoresist height in the given region after development. A second portion of the photoresist layer is exposed to UV radiation; the first and the second portions are overlapped at least in a third portion. The photoresist layer is developed so as to form in the third portion of the photoresist layer exposed to both electron beam and to UV radiation a first surface having an angle relative to the propagating direction. The substrate and the photoresist are etched so that a second angled surface is formed in the substrate in correspondence to the third portion. The second surface forms an angle with the propagating direction.
Public/Granted literature
- US20110136063A1 METHOD TO FABRICATE A REDIRECTING MIRROR IN OPTICAL WAVEGUIDE DEVICES Public/Granted day:2011-06-09
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