Invention Grant
- Patent Title: Method for fabricating nonvolatile memory device
- Patent Title (中): 非易失性存储器件的制造方法
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Application No.: US12461188Application Date: 2009-08-04
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Publication No.: US08236647B2Publication Date: 2012-08-07
- Inventor: Juyul Lee , Seungjae Baik , Kihyun Hwang , Siyoung Choi
- Applicant: Juyul Lee , Seungjae Baik , Kihyun Hwang , Siyoung Choi
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2008-0081965 20080821
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Provided is a method for fabricating a nonvolatile memory device capable of improving charge retention characteristics. The method for fabricating a nonvolatile memory device includes forming a charge trapping layer with a memory region and a charge blocking region on a semiconductor substrate, and trapping charges in the charge blocking region of the charge trapping layer.
Public/Granted literature
- US20100048012A1 Method for fabricating nonvolatile memory device Public/Granted day:2010-02-25
Information query
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