Invention Grant
US08236649B2 Semiconductor memory device with spacer shape floating gate and manufacturing method of the semiconductor memory device 有权
具有间隔物形状的浮栅的半导体存储器件和半导体存储器件的制造方法

  • Patent Title: Semiconductor memory device with spacer shape floating gate and manufacturing method of the semiconductor memory device
  • Patent Title (中): 具有间隔物形状的浮栅的半导体存储器件和半导体存储器件的制造方法
  • Application No.: US12634000
    Application Date: 2009-12-09
  • Publication No.: US08236649B2
    Publication Date: 2012-08-07
  • Inventor: Dae Il Kim
  • Applicant: Dae Il Kim
  • Applicant Address: KR Seoul
  • Assignee: Dongbu Hitek Co., Ltd.
  • Current Assignee: Dongbu Hitek Co., Ltd.
  • Current Assignee Address: KR Seoul
  • Agency: Saliwanchik, Lloyd & Eisenschenk
  • Priority: KR10-2008-0138848 20081231
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Semiconductor memory device with spacer shape floating gate and manufacturing method of the semiconductor memory device
Abstract:
A semiconductor memory device is provided including: a spacer shaped floating gate formed on a semiconductor substrate; a dielectric layer spacer formed at one side wall of the floating gate; a third oxide layer formed over the floating gate and the dielectric layer; and a control gate formed over the third oxide layer. According to an embodiment, the structure of the floating gate in a plate shape whose center is concave is improved to the spacer structure, making it possible to minimize the size of the semiconductor memory device and to improve density. Moreover, a LOCOS process can be excluded while forming the floating gate, making it possible to more efficiently fabricate the device.
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