Invention Grant
- Patent Title: Self-aligned well implant for improving short channel effects control, parasitic capacitance, and junction leakage
- Patent Title (中): 自对准井注入,用于改善短沟道效应控制,寄生电容和结漏电
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Application No.: US12568287Application Date: 2009-09-28
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Publication No.: US08236661B2Publication Date: 2012-08-07
- Inventor: Robert H. Dennard , Brian J. Greene , Zhibin Ren , Xinlin Wang
- Applicant: Robert H. Dennard , Brian J. Greene , Zhibin Ren , Xinlin Wang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Wenjie Li
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of forming a self-aligned well implant for a transistor includes forming a patterned gate structure over a substrate, including a gate conductor, a gate dielectric layer and sidewall spacers, the substrate including an undoped semiconductor layer beneath the gate dielectric layer and a doped semiconductor layer beneath the undoped semiconductor layer; removing portions of the undoped semiconductor layer and the doped semiconductor layer left unprotected by the patterned gate structure, wherein a remaining portion of the undoped semiconductor layer beneath the patterned gate structure defines a transistor channel and a remaining portion of the doped semiconductor layer beneath the patterned gate structure defines the self-aligned well implant; and growing a new semiconductor layer at locations corresponding to the removed portions of the undoped semiconductor layer and the doped semiconductor layer, the new semiconductor layer corresponding to source and drain regions of the transistor.
Public/Granted literature
Information query
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