Invention Grant
- Patent Title: Non-volatile memory device having bottom electrode
- Patent Title (中): 具有底部电极的非易失性存储器件
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Application No.: US13087189Application Date: 2011-04-14
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Publication No.: US08237149B2Publication Date: 2012-08-07
- Inventor: Gyu-Hwan Oh , Sug-Woo Jung , Dong-Hyun Im
- Applicant: Gyu-Hwan Oh , Sug-Woo Jung , Dong-Hyun Im
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2007-0059273 20070618; KR10-2010-0116251 20101122
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/108 ; H01L29/94 ; H01L31/032

Abstract:
Provided is a non-volatile memory device including a bottom electrode disposed on a substrate and having a lower part and an upper part. A conductive spacer is disposed on a sidewall of the lower part of the bottom electrode. A nitride spacer is disposed on a top surface of the conductive spacer and a sidewall of the upper part of the bottom electrode. A resistance changeable element is disposed on the upper part of the bottom electrode and the nitride spacer. The upper part of the bottom electrode contains nitrogen (N).
Public/Granted literature
- US20110193048A1 NON-VOLATILE MEMORY DEVICE HAVING BOTTOM ELECTRODE Public/Granted day:2011-08-11
Information query
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