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US08237361B2 Display device with protective film having a low density silicon nitride film between high density silicon nitride films 失效
具有在高密度氮化硅膜之间具有低密度氮化硅膜的保护膜的显示装置

Display device with protective film having a low density silicon nitride film between high density silicon nitride films
Abstract:
There is provided a display capable of protecting a light-emitting device by a protective film having good sealing characteristics and sidewall step coverage and preventing deterioration of the light-emitting device, thereby maintaining good display characteristics. A display device 1 including an organic electroluminescence device 3 provided on a substrate 2 and protected by a protective film 4 is characterized in that the protective film 4 is composed of silicon nitride films 4a, 4b, and 4c formed in layers by a chemical vapor deposition method using an ammonia gas, the high-density silicon nitride film 4c is provided in a surface layer of the protective film 4, and the low-density silicon nitride film 4b having a lower density than that of the high-density silicon nitride film 4c is provided below it.
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