Invention Grant
US08237458B2 Electromigration testing and evaluation apparatus and methods 有权
电气检测和评估装置及方法

  • Patent Title: Electromigration testing and evaluation apparatus and methods
  • Patent Title (中): 电气检测和评估装置及方法
  • Application No.: US12594212
    Application Date: 2008-03-27
  • Publication No.: US08237458B2
    Publication Date: 2012-08-07
  • Inventor: Xavier Federspiel
  • Applicant: Xavier Federspiel
  • Applicant Address: NL Eindhoven
  • Assignee: NXP B.V.
  • Current Assignee: NXP B.V.
  • Current Assignee Address: NL Eindhoven
  • Priority: EP07290395 20070402
  • International Application: PCT/IB2008/051154 WO 20080327
  • International Announcement: WO2008/120151 WO 20081009
  • Main IPC: G01R27/08
  • IPC: G01R27/08
Electromigration testing and evaluation apparatus and methods
Abstract:
The present invention relates to electromigration testing and evaluation methods and apparatus for a device under test with an interconnect structure. The method comprises forcing the occurrence of a step resistance-increase of the interconnect structure due to electromigration in the first layer and subsequently subjecting the interconnect structure to at least three respective predetermined stress conditions while concurrently measuring a test quantity indicative of an electrical resistance of the interconnect structure. The method allows performing an electromigration test in much shorter time than known electromigration testing methods, without loss of information or accuracy. It is therefore possible to accelerate the optimization of the interconnect manufacturing process so that the conductor electromigration kinetics remains compatible with a required product lifetime. This allows reducing the time and cost for electromigration testing and thus fabricating integrated-circuit devices with a lower overall cost.
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