Invention Grant
- Patent Title: Optical system of a microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置的光学系统
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Application No.: US12498475Application Date: 2009-07-07
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Publication No.: US08237918B2Publication Date: 2012-08-07
- Inventor: Michael Totzeck , Toralf Gruner , Damian Fiolka
- Applicant: Michael Totzeck , Toralf Gruner , Damian Fiolka
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/72
- IPC: G03B27/72

Abstract:
An optical system, such as an illumination device or a projection objective of a microlithographic projection exposure apparatus, is disclosed. The optical system can include a polarization compensator which has at least one polarization-modifying partial element. The optical system can also include a manipulator by which the position of the at least one partial element can be altered. At least one operating mode of the optical system can be set in which the intensity, over a region which belongs to a plane perpendicular to the optical axis and which can be illuminated with light from the light source, does not exceed 20% of the maximum intensity in the plane, and the manipulator is arranged in the region.
Public/Granted literature
- US20090323042A1 OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2009-12-31
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