A method and system for automatically inspecting parts and for automatically generating calibration data for use in inspecting parts are provided. The system includes a support for supporting a part to be inspected and/or a calibration device along a measurement axis. The system further includes a head apparatus including a plurality of radiation plane generators for directing an array of planes of radiation at the part and/or device so that the part and/or device occludes each of the planes of radiation to create a corresponding array of unobstructed planar portions of the planes of radiation. Each of the unobstructed planar portions contains an amount of radiation which is representative of a respective geometric dimension of the part and/or device. The head apparatus further includes a plurality of radiation plane receivers or cameras such as line scan cameras. Each of the cameras measures the amount of radiation present in an adjacent pair of unobstructed planar portions created from the same plane of radiation to obtain at least one measurement signal. The system still further includes a stage subsystem including a stage movable along a stage axis substantially parallel to the measurement axis and coupled to the head apparatus to move therewith for translating the head apparatus relative to the part and/or device along the stage axis so that the planes of radiation scan the part and/or device supported by the support substantially perpendicular to the stage and measurement axes. The system may further include one or more mechanisms for reducing radiation cross talk between neighboring cameras.