Invention Grant
US08238007B2 On-the-fly laser beam path error correction for specimen target location processing
有权
用于样本目标位置处理的实时激光束路径误差校正
- Patent Title: On-the-fly laser beam path error correction for specimen target location processing
- Patent Title (中): 用于样本目标位置处理的实时激光束路径误差校正
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Application No.: US11616070Application Date: 2006-12-26
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Publication No.: US08238007B2Publication Date: 2012-08-07
- Inventor: Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
- Applicant: Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B23K26/08
Abstract:
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
Public/Granted literature
- US20080017618A1 ON-THE-FLY LASER BEAM PATH ERROR CORRECTION FOR SPECIMEN TARGET LOCATION PROCESSING Public/Granted day:2008-01-24
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