Invention Grant
US08238074B2 Capacitive RF-MEMS device with integrated decoupling capacitor
有权
具有集成去耦电容器的电容RF-MEMS器件
- Patent Title: Capacitive RF-MEMS device with integrated decoupling capacitor
- Patent Title (中): 具有集成去耦电容器的电容RF-MEMS器件
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Application No.: US11913285Application Date: 2006-04-21
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Publication No.: US08238074B2Publication Date: 2012-08-07
- Inventor: Peter Gerard Steeneken
- Applicant: Peter Gerard Steeneken
- Applicant Address: DE Munich
- Assignee: EPCOS AG
- Current Assignee: EPCOS AG
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Priority: EP05103644 20050502
- International Application: PCT/IB2006/051247 WO 20060421
- International Announcement: WO2006/117709 WO 20061109
- Main IPC: H01G5/16
- IPC: H01G5/16 ; H01G7/00 ; H01G7/06
Abstract:
The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.
Public/Granted literature
- US20090201623A1 CAPACITIVE RF-MEMS DEVICE WITH INTEGRATED DECOUPLING CAPACITOR Public/Granted day:2009-08-13
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