Invention Grant
US08238396B2 Gas laser oscillator having function for judging discharge initiation
有权
具有判断放电起始功能的气体激光振荡器
- Patent Title: Gas laser oscillator having function for judging discharge initiation
- Patent Title (中): 具有判断放电起始功能的气体激光振荡器
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Application No.: US13038548Application Date: 2011-03-02
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Publication No.: US08238396B2Publication Date: 2012-08-07
- Inventor: Hajime Ikemoto , Masahiro Honda
- Applicant: Hajime Ikemoto , Masahiro Honda
- Applicant Address: JP Minamitsuru-gun, Yamanashi
- Assignee: FANUC Corporation
- Current Assignee: FANUC Corporation
- Current Assignee Address: JP Minamitsuru-gun, Yamanashi
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2010-087107 20100405
- Main IPC: H01S3/13
- IPC: H01S3/13 ; H01S3/00 ; H01S3/22 ; H01S3/223

Abstract:
A gas laser oscillator capable of initiating discharge, without applying excess voltage to a discharge tube, and correctly and rapidly judging the initiation of discharge. The oscillator has a laser power commanding part adapted to generate a laser power command including a pulse superimposed on a forefront of each step, a voltage applying part adapted to apply a voltage to a discharge tube based on the laser power command, a discharge tube voltage detecting part adapted to detect the discharge tube voltage, a discharge tube voltage monitoring part adapted to monitor the discharge tube voltage, and a discharge initiation judging part adapted to judge that the discharge is initiated when the difference, between a change rate of the monitored voltage and a change rate of the discharge tube voltage predetermined based on data obtained while the discharge is normally carried out, is smaller than a predetermined threshold.
Public/Granted literature
- US20110243168A1 GAS LASER OSCILLATOR HAVING FUNCTION FOR JUDGING DISCHAGE INITIATION Public/Granted day:2011-10-06
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