An information processing apparatus processes information generated by an exposure apparatus. The information processing apparatus includes a collecting unit and a converting unit. The collecting unit collects first apparatus information obtained by the exposure apparatus via an operation of the exposure apparatus with respect to each of a plurality of first regions which form a first array defined on a substrate. The converting unit converts at least part of the first apparatus information collected by the collecting unit into second apparatus information with respect to each of a plurality of second regions which form a second array.