Invention Grant
- Patent Title: Routing system and method for double patterning technology
- Patent Title (中): 双重图案化技术的路由系统和方法
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Application No.: US12649979Application Date: 2009-12-30
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Publication No.: US08239806B2Publication Date: 2012-08-07
- Inventor: Huang-Yu Chen , Yuan-Te Hou , Gwan Sin Chang , Wen-Ju Yang , Zhe-Wei Jiang , Yi-Kan Cheng , Lee-Chung Lu
- Applicant: Huang-Yu Chen , Yuan-Te Hou , Gwan Sin Chang , Wen-Ju Yang , Zhe-Wei Jiang , Yi-Kan Cheng , Lee-Chung Lu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Agent Steven E. Koffs
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method includes receiving an identification of a plurality of circuit components to be included in an IC layout. Data are generated representing a first pattern to connect two of the circuit components. The first pattern has a plurality of segments. At least two of the segments have lengthwise directions perpendicular to each other. At least one pattern-free region is reserved adjacent to at least one of the at least two segments. Data are generated representing one or more additional patterns near the first pattern. None of the additional patterns is formed in the pattern-free region. The first pattern and the additional patterns form a double-patterning compliant set of patterns. The double-patterning compliant set of patterns are output to a machine readable storage medium to be read by a system for controlling a process to fabricate a pair of masks for patterning a semiconductor substrate using double patterning technology.
Public/Granted literature
- US20110119648A1 ROUTING SYSTEM AND METHOD FOR DOUBLE PATTERNING TECHNOLOGY Public/Granted day:2011-05-19
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