Invention Grant
- Patent Title: Semiconductor storage device
- Patent Title (中): 半导体存储设备
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Application No.: US12723864Application Date: 2010-03-15
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Publication No.: US08243524B2Publication Date: 2012-08-14
- Inventor: Yuya Suzuki , Toshiki Hisada , Yoshikazu Hosomura
- Applicant: Yuya Suzuki , Toshiki Hisada , Yoshikazu Hosomura
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-062577 20090316
- Main IPC: G11C16/06
- IPC: G11C16/06

Abstract:
A semiconductor storage device has a sense amplifier. The sense amplifier includes a first lower interconnection; a second interlayer insulation film formed on the first interlayer insulation film and top of the first interconnection; a contact interconnection formed in a direction perpendicular to a substrate plane of the semiconductor substrate so as to pass through the second interlayer insulation film, and connected to the first lower interconnection; a first upper interconnection formed on the second interlayer insulation film and connected to the contact interconnection disposed under the first upper interconnection; a dummy contact interconnection formed in a direction perpendicular to the substrate plane of the semiconductor substrate in the second interlayer insulation film, and adjacent to the contact interconnection; and a second upper interconnection formed on the second interlayer insulation film so as to extend in the first direction, and connected to the dummy contact interconnection disposed under the second upper interconnection.
Public/Granted literature
- US20100232225A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2010-09-16
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