Invention Grant
- Patent Title: Particle beam device and method for use in a particle beam device
- Patent Title (中): 用于粒子束装置的粒子束装置和方法
-
Application No.: US12156954Application Date: 2008-06-05
-
Publication No.: US08247785B2Publication Date: 2012-08-21
- Inventor: Ulrike Zeile , Andreas Schertel
- Applicant: Ulrike Zeile , Andreas Schertel
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102007026847 20070606
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In various embodiments, the receiving element may be situated removably on the carrier element and/or multiple receiving elements may be situated on the carrier element in such a way that a movement of the carrier element causes a movement of the multiple receiving elements in the same spatial direction or around the same axis. The carrier element may be movable in three spatial directions situated perpendicular to one another and rotatable around a first axis which is parallel to an optical axis of the particle beam device and around a second axis which is situated perpendicular to the optical axis. A method for using the particle beam device in connection with specimen study and preparation is also disclosed.
Public/Granted literature
- US20090014648A1 Particle beam device and method for use in a particle beam device Public/Granted day:2009-01-15
Information query