Invention Grant
US08253429B2 Probe card having a plurality of space transformers 有权
具有多个空间变压器的探针卡

  • Patent Title: Probe card having a plurality of space transformers
  • Patent Title (中): 具有多个空间变压器的探针卡
  • Application No.: US12674277
    Application Date: 2008-01-08
  • Publication No.: US08253429B2
    Publication Date: 2012-08-28
  • Inventor: Yong Goo LeeMaeng Youl Lee
  • Applicant: Yong Goo LeeMaeng Youl Lee
  • Applicant Address: KR Suwon-si
  • Assignee: Gigalane Co., Ltd.
  • Current Assignee: Gigalane Co., Ltd.
  • Current Assignee Address: KR Suwon-si
  • Agency: Stein McEwen, LLP
  • Priority: KR10-2007-0085147 20070823
  • International Application: PCT/KR2008/000084 WO 20080108
  • International Announcement: WO2009/025427 WO 20090226
  • Main IPC: G01R31/20
  • IPC: G01R31/20
Probe card having a plurality of space transformers
Abstract:
A probe card of a semiconductor test apparatus having a plurality of space transformers supporting probe units of the probe card is provided. A probe card of the present invention includes a plurality of probe units, each comprising a guide member and at least one probe secured by the guide member and contacting a chip pad to be tested; a plurality of space transformers arranged below the respective probe units, each space transformer having wires electrically connected to lower terminals of the probes; a frame having a plurality of guide holes for fixedly positioning the respective probe units; an interposer array arranged below the space transformers for supporting the space transformers, interposer array comprising electrical connection means for supplying test signals to the wires of the space transformers; and a printed circuit board arranged below the interposer array for supporting the interposer array and electrically connected to the electrical connection means for supplying the test signals. In the probe card of the present invention, the probe units are independently supported by respective space transformers such that it is possible to reduce thermal distortion of the probe card and simplifying the manufacturing and repairing processes.
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