Invention Grant
- Patent Title: Using optical deflection of cantilevers for alignment
- Patent Title (中): 使用悬臂的光学偏转进行对准
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Application No.: US11848211Application Date: 2007-08-30
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Publication No.: US08256017B2Publication Date: 2012-08-28
- Inventor: Jason Haaheim
- Applicant: Jason Haaheim
- Applicant Address: US IL Skokie
- Assignee: NanoInk, Inc.
- Current Assignee: NanoInk, Inc.
- Current Assignee Address: US IL Skokie
- Agency: Foley & Lardner LLP
- Main IPC: G01Q10/04
- IPC: G01Q10/04

Abstract:
A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference.
Public/Granted literature
- US20080055598A1 USING OPTICAL DEFLECTION OF CANTILEVERS FOR ALIGNMENT Public/Granted day:2008-03-06
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