Invention Grant
- Patent Title: In-liquid-substance detection sensor
- Patent Title (中): 液体物质检测传感器
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Application No.: US12555894Application Date: 2009-09-09
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Publication No.: US08256275B2Publication Date: 2012-09-04
- Inventor: Hajime Yamada , Naoko Aizawa , Yoshihiro Koshido , Koji Fujimoto , Toru Yabe , Michio Kadota
- Applicant: Hajime Yamada , Naoko Aizawa , Yoshihiro Koshido , Koji Fujimoto , Toru Yabe , Michio Kadota
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2007-089317 20070329
- Main IPC: G01N29/00
- IPC: G01N29/00

Abstract:
An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.
Public/Granted literature
- US20090320574A1 IN-LIQUID-SUBSTANCE DETECTION SENSOR Public/Granted day:2009-12-31
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